The equivalent circuit of a radio frequency (RF) plasma with the transformer model can be represented as follows:
Lp Cp
-------//\/\/\/\-------- **Plasma**
| |
Cin Cout
| |
Rg |
| |
-------- |
| | |
| | |
| | |
| | |
| | |
| | |
-------- |
|
Rl
|
Gnd
where:
Lp: inductance of the RF transformer
Cp: Primary winding capacitance of the RF transformer
Cin: Input matching capacitance
Cout: Output matching capacitance
Rg: Generator resistance
Rl: Load resistance
Gnd: Ground